| 000 | 00392nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230913s9999 xx 000 0 und d | ||
| 082 | _a621.817 CAM | ||
| 100 | _aCampbell, Stephen A | ||
| 245 | 4 | _aThe Science And Engineering Of Microelectronic Fab | |
| 250 | _aIInd | ||
| 260 | _aNEW DELHI | ||
| 260 | _bOXFORD | ||
| 260 | _c2004 | ||
| 300 | _a603 | ||
| 650 | _aElectronics Engineering | ||
| 999 |
_c133718 _d133718 |
||