000 00301nam a2200121Ia 4500
008 230913s9999 xx 000 0 und d
100 _aChoudhary, Rai
245 0 _aMems& Moems Technology & Application
260 _aNEW DELHI
260 _bPHI
260 _c2010
650 _aElectronics Engineering
999 _c134710
_d134710