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| 082 | _a621.38122 hsu | ||
| 100 | _aHsu, Tai Ran | ||
| 245 | 0 | _aMems And Microsystems Design And Manufacture | |
| 260 | _aNEW DELHI | ||
| 260 | _bTMH | ||
| 260 | _c2006 | ||
| 300 | _a436 | ||
| 650 | _aElectronics Engineering | ||
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