000			00353nam a2200145Ia 4500
008			230912s9999 xx 000 0 und d
082			_a621.381 GAN
100			_aGandhi, Sarab K.
245		0	_aVlsi Fabrication Principles: Silicon And Gallium Arsenide
250			_aIInd
260			_aNEW DELHI
260			_bWILEY
260			_c2011
300			_a834
999			_c25848 _d25848